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How Can I See an Overview of Aberrations in my System?
- By Mark Nicholson
- Published 31 July 2006
- Frequently Asked Questions
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The Seidel Diagram
Answer: Yes there is. The Siedel Diagram, sometimes called a Pagel (or Pegel) Diagram, gives a graphical representation of the third-order aberrations in a system.
Imagine you are designing a fairly complex system like a 'double-bump' microlithography lens:

Maybe you still need to improve the design, and you're thinking about adding an asphere or an extra element. Where should it go? Or maybe you're thinking about tolerancing: which surfaces are likely to be most sensitive?
A good place to start in answering these questions is the Seidel Diagram, found under Analysis -> Aberration Coefficients -> Seidel Diagram:


The Seidel Diagram shows the five third-order Seidel aberration coefficients as a histogram for each surface, and as a system sum. It helps to identify easily those surfaces that add or subtract most of a certain aberrations, and also which surfaces are balancing aberrations. Its a quick way to zoom into the hardest-working surfaces in your system!
2 Responses to "How Can I See an Overview of Aberrations in my System?" 
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said this on 07 Aug 2006 10:08:42 AM PDT
Hello,
It would be nice to have the plot include higher order data. If shown next to the 3rd order (SA3 and SA5) this would be helpful.
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said this on 21 Sep 2006 4:10:52 PM PDT
This feature is a lot easier to read compared to looking at the list of seidel aberrations to get the same information.
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